Reconstruction algorithms of electron-based holograms
AssigneeFEI Company
InventorsKun Liu, Alan Bahm, Marcus Straw
Life of this patent
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Abstract
Apparatuses and methods for improved reconstructions of electron-based holograms are disclosed herein. An example method at least includes forming a hologram of a sample and a known object, forming a reconstruction of the known object using a reconstruction algorithm, comparing the reconstruction of the known object to a reference reconstruction of the known object, and adjusting the reconstruction algorithm based on the comparison of the reconstruction of the known object to the reference reconstruction of the known object. The example method may further include forming a reconstruction of the sample using the adjusted reconstruction algorithm.
Claims18
A method comprising:
- forming, with an electron beam, a hologram of a sample and a known object, wherein the known object is of a comparable size of the sample;
- forming a reconstruction of the known object using a reconstruction algorithm;
- comparing the reconstruction of the known object to a reference reconstruction of the known object;
- and
- adjusting a reconstruction of the sample based on the comparison of the reconstruction of the known object to the reference reconstruction of the known object, wherein the known object is a Bucky Ball, an RNA molecule, or a DNA molecule.
An apparatus comprising:
- an electron emitter coupled to provide an electron beam;
- a detector arranged to receive the electron beam after the electron beam interacts with a sample and a fiducial, wherein the fiducial is a Bucky Ball, an RNA molecule, or a DNA molecule;
- and
- a controller coupled at least to the detector to receive holograms of the sample and fiducial acquired by the detector, the controller including code that, when executed, causes the controller to:
- form a reconstruction of the fiducial using a reconstruction algorithm;
- compare the reconstruction of the fiducial to a known reconstruction of the fiducial;
- and
- adjust a reconstruction of the sample based on the comparison.
Dependencies are inferred from the claim text.