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AssigneeResonac Corporation
InventorsAtsushi Suzuki, Kazuma Matsui
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A method for removing a halogen fluoride in a mixed gas by reacting the mixed gas containing a halogen fluoride including bromine or iodine with a removing agent, wherein the removing agent is a chloride, bromide or iodide of potassium, sodium, magnesium, calcium and barium. Also disclosed is a quantitative analysis method as well as a quantitative analyzer for a gas component contained in a hydrogen fluoride mixed gas, the method characterized by reacting a mixed gas containing a halogen fluoride and another gas component with a removing agent, thereby removing the halogen fluoride in the mixed gas, further removing produced by-products, and quantitatively analyzing a residual gas by a gas chromatograph.
A method for removing a halogen fluoride in a mixed gas, characterized by reacting a mixed gas containing the halogen fluoride including bromine or iodine and another gas component with a removing agent which is a chloride, bromide or iodide of an element selected from the group consisting of potassium, sodium, magnesium, calcium or barium.
A quantitative analysis method for a gas component contained in a halogen fluoride mixed gas, characterized by reacting a mixed gas containing a halogen fluoride including bromine or iodine and another gas component with a removing agent, thereby removing the halogen fluoride in the mixed gas, further removing produced by-products and quantitatively analyzing a residual gas by a gas chromatograph,
Dependencies are inferred from the claim text.