Substituted aluminum nitride for improved acoustic wave filters
AssigneeSkyworks Solutions, Inc.
InventorsMichael David Hill, Peter Ledel Gammel
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Abstract
An acoustic wave resonator comprises a piezoelectric material formed of aluminum nitride (AlN) doped with calcium (Ca) to enhance performance of the acoustic wave resonator.
Claims22
An acoustic wave resonator comprising a piezoelectric material formed of aluminum nitride doped with calcium to enhance performance of the acoustic wave resonator, wherein the calcium is charge balanced with at least one of silicon and germanium and the piezoelectric material has a chemical formula of one of
- Al1−2xCaxSixN (0<x<1);
- or
- Al1−2xCaxGexN (0<x<1).
A method of forming an acoustic wave resonator comprising:
- forming a piezoelectric film formed of aluminum nitride doped with calcium, wherein the calcium is charge balanced with at least one of silicon and germanium and the piezoelectric material has a chemical formula of one of
- Al1−2xCaxSixN (0<x<1);
- or
- Al1−2xCaxGexN (0<x<1);
- and
- depositing electrodes on the piezoelectric film to form the acoustic wave resonator.
An acoustic wave resonator including a film of piezoelectric material and an electrode disposed on the film of piezoelectric material, the film of piezoelectric material comprising:
- AlN doped with cations of one or more elements selected from the group consisting of:
- a) one of Sb, or Nb;
- b) Cr in combination with one or more of B, Sc, Y, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, or Yb;
- c) one of Nb and Ta in combination with one of Li, Ca, Ni, or Co;
- d) Ca in combination with one of Si or Ge;
- e) Mg in combination with one of Si or Ge;
- or
- f) one or more of Co, Sb, Ta, Nb, Si, or Ge in combination with one or more of Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, or Yb;
- the cations at least partially substituting for Al in a crystal structure of the piezoelectric material.
Dependencies are inferred from the claim text.