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US 11,778,890 B2Granted
Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
AssigneeSamsung Display Co., Ltd.
InventorsSu-Hwan Lee, Un-Cheol Sung, Mu-Hyun Kim, Dong-Kyu Lee
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Abstract
An organic layer deposition apparatus and a method of manufacturing an organic light-emitting display device by using the apparatus. In particular, an organic layer deposition apparatus that is more easily manufactured and is suitable for use in mass production of large substrates while performing high-definition patterning thereon, as well as a method of manufacturing an organic light-emitting display device by using such an apparatus.
Claims13
A method of manufacturing an organic light-emitting display device, the method comprising:
- conveying a moving unit into a chamber, the moving unit having a substrate coupled thereto, the conveying performed by a first conveyer unit installed to pass into the chamber;
- forming an organic layer on the substrate by depositing a deposition material from an organic layer deposition assembly on the substrate while the substrate is moved relative to the organic layer deposition assembly, the organic layer deposition assembly being positioned in the chamber and spaced apart from the substrate by a predetermined distance;
- after the substrate is separated from the moving unit, conveying the moving unit with a second conveyer unit installed to pass through the chamber;
- replacing a deposition source by a deposition source replacement unit;
- and
- replacing a patterning slit sheet by a patterning slit sheet replacement unit,
- wherein in the chamber, the first conveyer unit is disposed above the second conveyer unit,
- wherein the forming an organic layer further comprises blocking the deposition material discharged from the organic layer deposition assembly from being deposited upon the substrate, the blocking being performed with a shielding member having a mesh member coupled thereto,
- wherein the moving unit circulates by moving through an upper part and lower part of the chamber,
- wherein the deposition source replacement unit is located at a first side of the chamber, and
- wherein the patterning slit sheet replacement unit is located at a second side of the chamber opposite the first side of the chamber.
8 more elements
Dependencies are inferred from the claim text.