High efficiency laser-sustained plasma light source with collection of broadband radiation
AssigneeKLA Corporation
InventorsMatthew Derstine, Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin
Life of this patent
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Abstract
A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
Claims25
A system comprising:
- a pump source configured to generate a pumping beam;
- a gas containment structure for containing a gas;
- an optical assembly including a multi-pass optical assembly and a collection assembly, wherein the multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma;
- and
- wherein the collection assembly includes one or more collection optical elements wherein the one or more collection optical elements are configured to collect and direct at least a portion of broadband radiation emitted by the plasma back to the plasma, wherein the one or more collection optical elements of the collection assembly are interspersed between the one or more optical elements of the multi-pass optical assembly.
A system comprising:
- an illumination source configured to generate a pumping beam;
- a reflector assembly configured to contain a gas, wherein the reflector assembly includes one or more entrance apertures for receiving the pumping beam from the illumination source, wherein the pumping beam sustains a plasma within a portion of the gas, wherein the plasma emits broadband radiation, wherein an internal surface of the reflector assembly is configured to collect at least a portion of the broadband radiation emitted by the plasma and direct the collected broadband radiation back to the plasma, wherein the reflector assembly is arranged to collect an unabsorbed portion of the pumping beam transmitted through the portion of the gas and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
Dependencies are inferred from the claim text.