Laser beam delivery apparatus for extreme ultra violet light source

A laser beam delivery apparatus comprising:

• a high power seed module configured to generate a laser beam;
• a power amplifier configured to amplify the laser beam generated by the high power seed module;
• a beam transfer module configured to collect and move the laser beam amplified by the power amplifier, the beam transfer module comprises a position adjuster configured to adjust a position of the laser beam, and the position adjuster comprises a refraction plate;
• a final focusing assembly optical platform configured to adjust focus of the laser beam collected and moved by the beam transfer module;
• and
• a focusing unit configured to focus the laser beam with the focus adjusted by the final focusing assembly optical platform to a target droplet.

A laser beam delivery apparatus comprising:

• a high power seed module configured to generate a laser beam;
• a power amplifier configured to amplify the laser beam generated by the high power seed module;
• a beam transfer module configured to collect and move the laser beam amplified by the power amplifier;
• a final focusing assembly optical platform configured to adjust focus of the laser beam collected and moved by the beam transfer module, the final focusing assembly optical platform including a position adjuster and a pointing adjuster, the position adjuster being configured to adjust a position of the laser beam, the position adjuster comprising a refraction plate, the pointing adjuster configured to adjust a pointing angle of the laser beam, and the pointing adjuster comprising a mirror;
• and
• a focusing unit configured to focus the laser beam with the focus adjusted by the final focusing assembly optical platform to a target droplet.