Heater
AssigneeNitto Denko Corporation
InventorsToshihiro Tsurusawa, Takeshi Tanaka, Yosuke Nakanishi, Kyotaro Yamada, Hironobu Machinaga
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Abstract
A heater (1a) includes a support (10) made of an organic polymer and having a sheet shape, a heating element (20), and at least one pair of power supply electrodes (30) in contact with the heating element (20). The heating element (20) is a transparent conductive film made of a polycrystalline material containing indium oxide as a main component. In the heater (1a), the heating element (20) has a specific resistance of 1.4×10−4 Ω·cm to 3×10−4 Ω·cm. The heating element (20) has a thickness of more than 20 nm and not more than 100 nm.
Claims11
A heater comprising:
- a support that is made of an organic polymer and has a sheet shape;
- a heating element that is a transparent conductive film made of a polycrystalline material containing indium oxide as a main component;
- and
- at least one pair of power supply electrodes in contact with the heating element,
- wherein the heating element has a thickness of more than 20 nm and not more than 100 nm,
- the heating element has a specific resistance of 1.4×10−4 Ω·cm to 3×10−4 Ω·cm, and
- the heating element comprises argons, a concentration of argon atoms contained in the heating element is 3.5 ppm to 2.5 ppm on a mass basis.
Dependencies are inferred from the claim text.