Acoustically decoupled MEMS devices
AssigneeGeorgia Tech Research Corporation
InventorsFarrokh Ayazi, Benoit Hamelin, Jeremy Yang
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Abstract
Embodiments of the present disclosure relate generally to acoustically decoupled microelectromechanical system devices and, more particularly, to acoustically decoupled microelectromechanical system devices anchored upon phononic crystals. In some embodiments described herein, a device may comprise a resonator, a handle layer, and a pedestal disposed between the resonator and the handle layer, the pedestal connecting the resonator to the handle layer. In the devices described herein, the resonator and the handle layer may be non-coplanar. In some embodiments, the handle layer comprises a phononic crystal to acoustically decouple the resonator from the substrate of the handle layer.
Claims30
A device comprising:
- a resonator comprising a perimeter edge and a first diameter;
- a handle layer comprising a phononic crystal structure;
- and
- a pedestal having a second diameter and connecting the resonator to the handle layer;
- wherein the second diameter is from between 1% and 10% of the first diameter.
A MEMS device comprising:
- a resonator having a perimeter edge;
- a handle layer comprising a phononic crystal structure;
- and
- a pedestal connecting the resonator to the handle layer;
- wherein the resonator has a first diameter and comprises a gyroscope;
- and
- wherein the handle layer has a second diameter greater than the first diameter.
A MEMS gyroscope comprising:
- a disk resonator comprising a perimeter edge and having a first diameter;
- a handle layer comprising a phononic crystal structure, wherein the handle layer comprises a thickness of approximately λ/4, and wherein λ is equal to a wavelength of an acoustic wave propagating through the handle layer corresponding to a disk resonator frequency;
- and
- a pedestal disposed between the disk resonator and the handle layer, the pedestal connecting the disk resonator to the handle layer, wherein the pedestal comprises a second diameter, and wherein the second diameter is less than the first diameter.
A MEMS gyroscope comprising:
- a disk resonator gyroscope comprising a perimeter edge and having a first diameter;
- a handle layer comprising a phononic crystal structure, wherein the handle layer comprises a thickness of approximately λ/4, and wherein λ is equal to a wavelength of an acoustic wave propagating through the handle layer corresponding to a disk resonator gyroscope frequency;
- a pedestal disposed between the disk resonator gyroscope and the handle layer, the pedestal connecting the disk resonator gyroscope to the handle layer, wherein the pedestal comprises a second diameter, and wherein the second diameter is less than the first diameter;
- a plurality of electrodes disposed proximate the perimeter edge of the disk resonator gyroscope;
- and
- a capacitive gap disposed between the disk resonator gyroscope and each of the plurality of electrodes.
Dependencies are inferred from the claim text.