Transport system, mover, control apparatus, and control method
AssigneeCanon Kabushiki Kaisha
InventorTakeshi Yamamoto
Life of this patent
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Abstract
A transport system includes: a mover having a first magnet group arranged in parallel to a first direction and a second magnet group arranged in parallel to a second direction crossing the first direction; and a plurality of coils arranged in parallel to the first direction so as to be able to face the first magnet group and the second magnet group, and the mover is able to move in the first direction along the plurality of coils by electromagnetic force received by the first magnetic group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnetic group or the second magnetic group from the plurality of coils.
Claims18
A transport system comprising:
- a first member including at least one coil;
- a second member including at least one magnet arranged capable of facing the coil;
- and
- a control unit that applies current to the coil,
- wherein the second member is movable relative to the first member, and
- wherein the control unit applies the current to the coil so as to control each of six-axis components of force to move the second member relative to the first member.
A control method of controlling a transport system, the transport system comprising a first member including at least one coil, a second member including at least one magnet arranged capable of facing the coil, and a control unit that applies current to the coil, wherein the second member is movable relative to the first member, the control method comprising:
- the control unit applying the current to the coil so as to control each of six-axis components of force to move the second member relative to the first member.
Dependencies are inferred from the claim text.