Emitter array with shared via to an ohmic metal shared between adjacent emitters
AssigneeLumentum Operations LLC
InventorsAlbert Yuen, Ajit Vijay Barve
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Abstract
An emitter array may comprise a plurality of emitters that includes two adjacent emitters. The emitter array may comprise a plurality of emitters that includes two adjacent emitters. The ohmic metal layer may include a portion that is shared by, and located between, the two adjacent emitters. The emitter array may comprise a protective layer over the ohmic metal layer. The emitter array may comprise a via through the protective layer to the portion. The via is shared by, and located between, the two adjacent emitters.
Claims20
A space-conserving vertical cavity surface emitting laser (VCSEL) array, comprising:
- a plurality of VCSELs including two adjacent VCSELs,
- wherein each of the two adjacent VCSELs has an independent optical aperture;
- an ohmic metal layer associated with the plurality of VCSELs;
- and
- a protective layer over the ohmic metal layer,
- wherein the protective layer includes a via to the ohmic metal layer,
- wherein the via is shared between the two adjacent VCSELs of the plurality of VCSELs,
- wherein the ohmic metal layer comprises separate portions with corresponding vias, and
- wherein the via is one of the corresponding vias and included in one of the separate portions.
A space-conserving emitter array, comprising:
- a plurality of emitters that includes two adjacent emitters,
- wherein each of the plurality of emitters has an independent optical aperture;
- an ohmic metal layer associated with the plurality of emitters,
- wherein the ohmic metal layer includes a portion that is shared by the two adjacent emitters,
- wherein the ohmic metal layer comprises one or more other portions that are separate from the portion,
- wherein the one or more other portions are associated with corresponding vias;
- a protective layer over the ohmic metal layer;
- and
- a via through the protective layer to the portion,
- wherein the via is shared by the two adjacent emitters.
A method of forming a space-conserving laser array, comprising:
- forming two adjacent lasers on or within a substrate,
- wherein each of the two adjacent lasers has an independent optical aperture;
- forming, in association with forming the two adjacent lasers, an ohmic metal layer including forming a portion of the ohmic metal layer shared by, and in a location between, the two adjacent lasers;
- forming, in association with forming the ohmic metal layer, a protective layer over the space-conserving laser array;
- and
- forming, in association with forming the protective layer, a via through the protective layer to the ohmic metal layer,
- wherein the ohmic metal layer comprises additional portions with corresponding vias, and
- wherein the via is one of the corresponding vias and included in one of the additional portions.
Dependencies are inferred from the claim text.