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US 11,777,059 B2Granted
Pixelated light-emitting diode for self-aligned photoresist patterning
AssigneeLumileds LLC
InventorsEmma Dohner, Kentaro Shimizu
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Abstract
A light source includes an array of light emitters, with at least some light emitters having a central patterned surface and an unpatterned border; a light blocking metal layer positioned between each of the array of light emitters; and down-converter material positioned on each of the array of light emitters.
Claims18
A light source, comprising:
- an array comprising:
- a plurality of light emitters, each light emitter comprising:
- a semiconductor layer having a first surface and a second surface,
- the first surfaces of at least a portion of the light emitters comprising:
- a central patterned surface and an unpatterned border having a width in a range of 1 to 50 microns, and
- a down-converter material on the semiconductor layer;
- and
- a light blocking metal layer positioned between each of the light emitters.
5 more elements
A method of manufacturing a light source by a self-aligned maskless method comprising:
- coating an array of light emitters with a positive photoresist;
- activating at least some of the light emitters to expose portions of the positive photoresist and create developed positive photoresist, each light emitter comprising:
- a semiconductor layer having a first surface and a second surface, the first surfaces of at least a portion of the light emitters comprising:
- a central patterned surface and an unpatterned border having a width in a range of 1 to 50 microns;
- washing away the developed positive photoresist to leave cavities having positive photoresist sidewalls;
- and
- at least partially filling the cavities with a down-converter material.
4 more elements
Dependencies are inferred from the claim text.