III-V fins by aspect ratio trapping and self-aligned etch to remove rough epitaxy surface
AssigneeInternational Business Machines Corporation
InventorsKangguo Cheng, Jeehwan Kim
Life of this patent
Estimating the term…
Abstract
A semiconductor device that includes a fin structure of a type III-V semiconductor material that is substantially free of defects, and has sidewalls that are substantially free of roughness caused by epitaxially growing the type III-V semiconductor material abutting a dielectric material. The semiconductor device further includes a gate structure present on a channel portion of the fin structure; and a source region and a drain region present on opposing sides of the gate structure.
Claims13
A method of reducing roughness in a fin structure comprising:
- forming a semiconductor material having a fin geometry with a first width, wherein a sidewall portion of the semiconductor material has a greater roughness than a central portion of the semiconductor material;
- forming a spacer component over the sidewall portion of the semiconductor material having the greater roughness;
- forming a masking structure over the central portion of the semiconductor material;
- and
- removing the spacer component and the sidewall portion of the semiconductor material using the masking structure as an etch mask to provide the fin structure having a second width that is less than the first width, wherein the sidewall of the dielectric layer is provided by a trench that is formed through the dielectric layer, the sidewall portion of the semiconductor material having the greater roughness results from epitaxial growth of the semiconductor material against a sidewall of a dielectric layer, and the fin structure has fin sidewalls that are substantially free of surface roughness caused by epitaxial grown of the semiconductor material.
A method of reducing roughness in epitaxially grown materials:
- epitaxially growing a semiconductor material, wherein a sidewall portion of the semiconductor material contacts a dielectric sidewall, the sidewall portion of the semiconductor material having a greater roughness than a central portion of the semiconductor material that is not in contact with the dielectric sidewall;
- forming a spacer atop on the sidewall portion of the semiconductor material and abutting the dielectric sidewall;
- forming a masking structure over the central portion of the semiconductor material;
- removing the spacer to expose the sidewall portion of the semiconductor material;
- and
- etching the sidewall portion of the semiconductor material selectively to the mask, wherein etching the sidewall portion removes the semiconductor material having the greater roughness than the central portion of the semiconductor material, wherein the sidewall portion has a surface roughness caused by epitaxial growth of the semiconductor material against a sidewall of a dielectric layer, the sidewall of the dielectric layer is provided by a trench that is formed through the dielectric layer.
A method of reducing roughness in a channel region of a semiconductor device fin structure comprising:
- forming a semiconductor material having a fin geometry with a first width, wherein a sidewall portion of the semiconductor material has a greater roughness than a central portion of the semiconductor material, wherein the sidewall portion of the semiconductor material having the greater roughness results from epitaxial growth of the semiconductor material against a sidewall of a dielectric layer, the sidewall of the dielectric layer is provided by a trench that is formed through the dielectric layer;
- forming a spacer component over the sidewall portion of the semiconductor material having the greater roughness;
- forming a masking structure over the central portion of the semiconductor material;
- removing the spacer component and the sidewall portion of the semiconductor material using the masking structure as an etch mask to provide a channel region of the fin structure having a second width that is less than the first width;
- and
- forming a gate structure on the channel region.
Dependencies are inferred from the claim text.