Care area based swath speed for throughput and sensitivity improvement

A system, comprising:

• an optical inspection tool including:
• a light emitter configured to emit particles in a light beam;
• a stage configured to hold a die in a path of the light beam emitted by the light emitter;
• a light detector configured to detect a portion of the light beam reflected by the die;
• and
• a controller in electronic communication with the optical inspection tool;
• and
• wherein the controller is configured to:
• receive a scan region of the die having a first care area;
• and
• instruct the optical inspection tool to optically scan:
• a first portion of the scan region within the die at a fast feed rate, wherein the first portion of the scan region is not within the first care area;
• and
• the first care area within the die at a slow feed rate, wherein the slow feed rate is less than the fast feed rate;
• wherein the optical scan includes:
• emitting, using the light emitter, the light beam toward the die resulting in an incidence on the die;
• detecting, using the light detector, the portion of light beam reflected from the incidence;
• and
• changing a position of the stage relative to the incidence.

A non-transitory computer-readable storage medium, comprising one or more programs for executing the following steps on one or more computing devices:

• instruct an optical inspection tool to:
• receive a scan region of a die having a first care area;
• send instructions to the optical inspection tool to emit a light beam;
• and
• send instructions to the optical inspection tool to change a position of a stage relative to an incidence of the light beam, thereby optically scanning:
• a first portion of the scan region within the die at a fast feed rate, wherein the first portion of the scan region is not within the first care area;
• and
• the first care area within the die at a slow feed rate.