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US 11,776,840 B2Granted
Superstrate chuck, method of use, and method of manufacturing an article
AssigneeCanon Kabushiki Kaisha
InventorsNilabh K. Roy, Mario Johannes Meissl, Seth J. Bamesberger, Ozkan Ozturk, Byung-Jin Choi
Life of this patent
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Abstract
A chuck for retaining a superstrate or a template. The chuck comprises a geometric structure formed on a surface of the chuck. The geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced.
Claims13
A light transmitting chuck for retaining a superstrate or a template, the chuck comprising:
- a chuck surface;
- a channel recessed from the chuck surface, the channel including:
- a channel surface parallel to the chuck surface;
- a channel sidewall extending from the chuck surface to the channel surface;
- a rounded edge between the chuck surface and the channel sidewall,
- wherein the chuck surface transitions to the channel sidewall via the rounded edge of the channel;
- and
- a land extending from the chuck surface, the land including:
- a land surface parallel to the chuck surface;
- a land sidewall extending from the land surface to the chuck surface;
- and
- a rounded edge between the land surface and the sidewall,
- wherein the land surface transitions to the land sidewall via the rounded edge of the land, and
- wherein an intensity variation of light transmitting through the land and an area of the chuck adjacent to the land is reduced by the rounded edge of the land.
11 more elements
A method, comprising:
- retaining a superstrate or a template with a light transmitting chuck, the chuck including:
- a chuck surface;
- a channel recessed from the chuck surface, the channel including:
- a channel surface parallel to the chuck surface;
- a channel sidewall extending from the chuck surface to the channel surface;
- and
- a rounded edge between the chuck surface and the channel sidewall,
- wherein the chuck surface transitions to the channel sidewall via the rounded edge of the channel;
- and
- a land extending from the chuck surface, the land including:
- a land surface parallel to the chuck surface;
- a land sidewall extending from the land surface to the chuck surface;
- and
- a rounded edge between the land surface and the land sidewall,
- wherein the land surface transitions to the land sidewall via the rounded edge of the land;
- advancing the superstrate or the template to be in contact with a formable material dispensed on a substrate;
- releasing the superstrate or the template from the chuck;
- and
- radiating light through the chuck and the superstrate or the template to cure the formable material, wherein an intensity variation of the light transmitting through the land and an area of the chuck adjacent to the land is reduced by the rounded edge of the land.
16 more elements
A method of manufacturing an article, comprising:
- dispensing a formable material on a substrate;
- retaining a superstrate with a light transmitting chuck, the chuck including:
- a chuck surface;
- a channel recessed from the chuck surface, the channel including:
- a channel surface parallel to the chuck surface;
- a channel sidewall extending from the chuck surface to the channel surface;
- a rounded edge between the chuck surface and the channel sidewall,
- wherein the chuck surface transitions to the channel sidewall via the rounded edge of the channel;
- and
- a land extending from the chuck surface, the land including:
- a land surface parallel to the chuck surface;
- a land sidewall extending from the land surface to the chuck surface;
- and
- a rounded edge between the land surface and the land sidewall,
- wherein the land surface transitions to the land sidewall via the rounded edge of the land;
- advancing the superstrate to be in contact with the formable material dispensed on the substrate;
- releasing the superstrate from the chuck;
- and
- radiating light through the chuck and the superstrate or the template to cure the formable material, wherein an intensity variation of the light transmitting through the land and an area of the chuck adjacent to the land is reduced by the rounded edge of the land.
16 more elements
Dependencies are inferred from the claim text.