US 11,776,830 B2 · Control system and method of machine and host computer

Abstract

The present disclosure provides a host computer, and a control system and method of a machine. The host computer includes a control unit, a service configuration unit, and a functional flow unit. The control unit is configured to control a lower level computer to execute items of a functional flow of the machine. The service configuration unit is configured with action instruction information used to execute the functional flow of the machine and configured to interact with the control unit. The functional flow unit stores items of the functional flow of the machine edited by a user and is configured to interact with the control unit. A technical solution of the host computer and the control system and method of the machine may realize an editable function of the functional flow of the machine to improve flexibility, convenience, and a degree of automation of addition/modification of the functional flow.

Claims9

Dependent claims

A control method of an etching machine, comprising:

editing a functional flow of the etching machine by using a host computer;
editing items of the functional flow of the etching machine item by item according to action instruction information configured with a service configuration circuit and used to execute the functional flow of the etching machine;
setting a time interval between adjacent items of the functional flow of the etching machine after editing the items of the functional flow and before storing the edited items;
storing edited items of the functional flow of the etching machine in a functional flow circuit;
and
starting the functional flow circuit and causing a control circuit to control a lower level computer to execute the stored items of the functional flow of the etching machine when needed.

3 more elements

Dependencies are inferred from the claim text.

Control system and method of machine and host computer

Life of this patent

Control system and method of machine and host computer

Life of this patent

Abstract

Claims9