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US 11,776,829 B2Granted
Dummy wafer
AssigneeTokyo Electron Limited
InventorsShigeru Kasai, Yutaka Akaike, Yoshiyasu Kato, Hiroyuki Nakayama, Hiroaki Komiya
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Abstract
A dummy wafer includes a planar heater and a pair of plate-shaped members formed of an aluminum alloy, aluminum, or silicon carbide, wherein the planar heater is sandwiched by the plate-shaped members.
Claims8
A dummy wafer comprising:
- a planar heater;
- and
- a pair of plate-shaped members formed of an aluminum alloy or aluminum,
- wherein the planar heater is sandwiched by the plate-shaped members, and
- wherein the aluminum alloy is an A5052 series or A6061 series aluminum alloy,
- wherein an oxide film, which is formed through an alumite treatment, is formed on a surface of each of the plate-shaped members.
3 more elements
A dummy wafer comprising:
- a planar heater;
- and
- a pair of plate-shaped members formed of an aluminum alloy or aluminum,
- wherein the planar heater is sandwiched by the plate-shaped members, and
- wherein an oxide film, which is formed through an alumite treatment, is formed on a surface of each of the plate-shaped members.
2 more elements
Dependencies are inferred from the claim text.