Adapter, connection device and supply system
AssigneeSuss Microtec Lithography GmbH
InventorsMichael Braun, Simon Schutzbach, Kader Mekias, Dinesh Vijayaraghavan, Orazio Monteserrato
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Abstract
An adapter for a liquid container of a supply system of a wet process module for the treatment of substrates has a container part for fastening to the liquid container and a channel part for fastening to the supply system. The container part has a central opening and a fastening device for fastening the container part to the liquid container. The channel part has a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part.
Claims16
An adapter for a liquid container of a supply system of a wet process module, for the treatment of substrates comprising
- a container part configured for fastening to the container and a channel part configured for fastening to the supply system,
- wherein the container part has a central opening and a fastening device configured for fastening the container part to the liquid container,
- wherein the channel part comprises a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part, and
- wherein a projection, through which the second channel portion extends, protrudes from the side of the channel part facing away from the container part.
A connection device for a liquid container of a supply system of a wet process module for the treatment of substrates, comprising
- an adapter for a liquid container of the supply system of the wet process module, comprising
- a container part configured for fastening to the liquid container and a channel part configured for fastening to the supply system,
- wherein the container part has a central opening and a fastening device configured for fastening the container part to the liquid container,
- wherein the channel part comprises a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part,
- and further comprising a connection part having a liquid inlet channel and a pressure channel,
- wherein the first channel portion of the adapter opens into the liquid inlet channel and the second channel portion of the adapter opens into the pressure channel,
- wherein a connection fastener of the connection part and a fastening part of the adapter each have at least one coupling component for fastening the adapter,
- the coupling components together forming a quick coupling, and
- wherein the configured is adapted to be fastened to or detached from the connection part by a rotation of at least one of the adapter and the connection fastener.
A supply system for a wet process module for the treatment of substrates comprising
- a base having a support surface configured for supporting a liquid container thereon, and
- a connection device for the liquid container comprising
- an adapter for the liquid container comprising
- a container part configured for fastening to the liquid container and a channel part configured for fastening to the supply system,
- wherein the container part has a central opening and a fastening device configured for fastening the container part to the liquid container,
- wherein the channel part comprises a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part,
- and further comprising a connection part having a liquid inlet channel and a pressure channel,
- wherein the first channel portion of the adapter opens into the liquid inlet channel and the second channel portion of the adapter opens into the pressure channel
- wherein a connection fastener of the connection part and a fastening part of the adapter each have at least one coupling component configured tot fastening the adapter,
- the coupling components together forming a quick coupling, and
- wherein the adapter is adapted to be fastened to or detached from the connection part by a rotation of at least one of the adapter and the connection fastener, and
- wherein the connection device is positioned spaced apart from and opposite the support surface,
- wherein the support surface is oblique to a horizontal.
Dependencies are inferred from the claim text.