Chamber for degassing substrates

A heater or cooler chamber for a batch of more than one workpiece, which are sheet-shaped, drum skin-like shaped in a frame, band-shaped or plate-shaped, wherein each shape has a pair of two-dimensionally extended surfaces and a thickness D of

• 0.01 mm<D<5 mm,
• comprising:
• a heat storage block made of one single metal piece or of more than one metal parts, narrowly coupled with respect to heat transfer and thermally behaving commonly in a manner only negligibly different from said equal single piece metal block or chunk;
• said block comprising more than one slit-pocket stacked one upon the other, each dimensioned to accommodate a single workpiece therein and extending along a slit-pocket plane;
• in each of said slit-pockets a workpiece support for a workpiece;
• each slit-pocket having at least one workpiece handling opening;
• each slit-pocket having inner surfaces configured to surround said single workpiece when said single workpiece is positioned on said workpiece support, wherein each of said inner surfaces is spaced from and does not contact said single workpiece, a height h of each of said slit-pocket perpendicular to said slit-pocket plane and along not less than 30% of an extent surface area of said slit-pockets, considered parallel to said slit-pocket plane being:
• 2.5 mm<h<50 mm
• the at least one workpiece handling openings of said slit-pockets being operatively connected to a door that controls the freeing and covering of the respective workpiece handling openings with respect to an atmosphere outside said block;
• a heater or cooler interface arrangement extending along an outward-facing side surface of the block in a direction perpendicular to said slit-pocket planes, said outward-facing side surface defining a heater interface or a cooler interface that traverses each of said slit-pockets, wherein said heater or cooler interface arrangement is configured to engage said heater interface or cooler interface and traverse each of said slit-pockets so that all said slit-pockets are simultaneously heated or cooled by said heater or cooler interface arrangement when heating or cooling is applied by said heater or cooler interface arrangement to said heater interface or cooler interface, wherein heat transfer between said heater interface or cooler interface and an interior of said slit-pockets occurs only through said inner surfaces of said slit-pockets;
• and
• a gas feed line arrangement dispatching in at least some of said slit-pockets or in all of said slit-pockets wherein said gas feed line arrangement comprises gas feed lines through said heat storage block and dispatching respectively into at least some of the pockets and dispatching into the pockets opposite the at least one workpiece handling opening of the respective pockets and directed towards said at least one workpiece handling opening.