Semiconductor devices and methods of manufacturing
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWan Hsuan Hsu, Jao Sheng Huang, Yen-Chiu Kuo, Yu-Li Cheng, Ya Tzu Chen, Neng-Jye Yang, Chun-Li Chou
Life of this patent
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Abstract
An apparatus, semiconductor device and method of manufacture are presented, wherein a hard mask layer and one or more etch stop layers are etched in an etching chamber. In an embodiment the semiconductor device is placed on a mounting platform at a first height and an etch process is performed, then the semiconductor device is moved to a second height within the chamber and a second etch process is performed, with the rotational speed of the semiconductor device reduced during movements in order to reduce the chance of cross contamination.
Claims20
A semiconductor manufacturing system comprising:
- a mounting platform movable between a first position and a second position;
- a motor connected to the mounting platform to move the mounting platform from the first position to the second position;
- a first tier located adjacent to the first position;
- a second tier located adjacent to the second position, the second tier different from the first tier;
- a first liquid dispenser located over the mounting platform when the mounting platform is located at the first position, the first liquid dispenser separated from the first tier and the second tier;
- and
- a second liquid dispenser located over the mounting platform when the mounting platform is located at the second position.
A semiconductor manufacturing system comprising:
- a first tier, a second tier, and a third tier stacked on top of each other around a mounting platform, wherein at least one of the first tier, the second tier, and the third tier are located within a plane along with the mounting platform, the plane being parallel with a major surface of the mounting platform;
- a motor attached to the mounting platform to move the mounting platform from a first position adjacent to the first tier to a second position adjacent to the second tier;
- and
- a first liquid dispenser moveable to a first position over the mounting platform;
- and
- a second liquid dispenser moveable to a second position over the mounting platform, the second liquid dispenser being different from the first liquid dispenser.
A semiconductor manufacturing system comprising:
- a first liquid dispenser rotatable between a first position and a second position, the first position being located over a mounting platform, the second position not being located over the mounting platform;
- a second liquid dispenser rotatable between a third position and a fourth position, the third position being located over the mounting platform, the fourth position not being located over the mounting platform;
- a third liquid dispenser rotatable between a fifth position and a sixth position, the fifth position being located over the mounting platform, the sixth position not being located over the mounting platform;
- a first liquid receiving tier, positioned to receive liquid from the mounting platform;
- a second liquid receiving tier over the first liquid receiving tier;
- and
- a third liquid receiving tier over the second liquid receiving tier.
Dependencies are inferred from the claim text.