Substance analyzer and substance analysis method
AssigneeHitachi High-Tech Corporation
InventorsYasuaki Takada, Shun Kumano, Masuyuki Sugiyama, Tsukasa Shishika, Shinji Yoshioka, Akimasa Osaka
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AssigneeHitachi High-Tech Corporation
InventorsYasuaki Takada, Shun Kumano, Masuyuki Sugiyama, Tsukasa Shishika, Shinji Yoshioka, Akimasa Osaka
Estimating the term…
A substance analyzer that includes, to enhance selectivity of substance analysis, the following: a heater that heats a medium for collecting a chemical substance adhering to a surface of an inspection object; a mass spectrometer that performs tandem mass spectrometry of vapor derived from the chemical substance heated and vaporized by the heater from the medium; and a control device that causes the mass spectrometer to perform, based on a temperature of the medium in the heater, tandem mass spectrometry for the chemical substance that is vaporized at the temperature of the medium using the vapor sent from the heater to the mass spectrometer.
A substance analyzer, comprising:
A substance analysis method, wherein:
Dependencies are inferred from the claim text.