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US 11,776,797 B2Granted
Vacuum cell configured for reduced inner chamber helium permeation
AssigneeColdQuanta, Inc.
InventorSteven Michael Hughes
Life of this patent
Estimating the term…
Abstract
A vacuum cell is described. The vacuum cell includes an inner chamber, a buffer channel, and a buffer ion pump. The buffer channel is fluidically isolated from the inner chamber and fluidically isolated from an ambient external to the vacuum cell. The buffer ion pump is fluidically coupled to the buffer channel and fluidically isolated from the ambient and the inner chamber.
Claims19
A vacuum cell, comprising:
- an inner chamber;
- a buffer channel, wherein the buffer channel is fluidically isolated from the inner chamber and from an ambient external to the vacuum cell;
- a buffer ion pump fluidically coupled to the buffer channel and fluidically isolated from the ambient and the inner chamber;
- a body;
- and
- a cover hermetically sealed to the body by a bond, the inner chamber and the buffer channel being between an inner surface of the body and the cover, the buffer channel being between the bond and the inner chamber.
3 more elements
A vacuum cell, comprising:
- an inner chamber;
- a buffer channel, wherein the buffer channel is fluidically isolated from the inner chamber and from an ambient external to the vacuum cell;
- and
- a buffer ion pump fluidically coupled to the buffer channel and fluidically isolated from the ambient and the inner chamber;
- wherein the vacuum cell includes a buffer ion pump chamber fluidically coupled with the buffer channel and a high vacuum pump chamber fluidically coupled with the inner chamber, the high vacuum pump chamber being fluidically isolated from the buffer channel, the buffer ion pump residing in the buffer ion pump chamber, the vacuum cell further comprising:
- an ultra-high vacuum pump residing in the high vacuum pump chamber.
3 more elements
A vacuum cell, comprising:
- a body;
- a cover hermetically sealed to the body by a bond, an inner chamber and a buffer channel being between the cover and the body, the buffer channel fluidically isolated from the inner chamber and from an ambient external to the vacuum cell, the buffer channel being between the bond and the inner chamber;
- a buffer ion pump fluidically coupled to the buffer channel and fluidically isolated from the ambient and the inner chamber;
- and
- an ultra-high vacuum pump fluidically coupled with the inner chamber and fluidically isolated from buffer channel.
2 more elements
A method for providing a vacuum cell, comprising:
- providing a body having an inner chamber and a buffer chamber;
- providing a buffer ion pump in the buffer chamber;
- and
- hermetically sealing a cover to the body by a bond, a buffer channel being formed between an inner surface of the body and the cover, the buffer channel being fluidically coupled to the buffer ion pump and fluidically isolated from an ambient and the inner chamber.
1 more element
Dependencies are inferred from the claim text.