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US 11,776,787 B2Granted
Charged particle beam apparatus
AssigneeJEOL Ltd.
InventorsKazuki Yagi, Yusuke Toriumi
Life of this patent
Estimating the term…
Abstract
A charged particle beam apparatus includes a tilt mechanism that tilts a specimen, a detector that detects an electromagnetic wave emitted from the specimen, a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on the detection solid angle of the detector are associated with each other, a tilt control unit that controls the tilt mechanism, and a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table.
Claims8
A charged particle beam apparatus comprising:
- a tilt mechanism that tilts a specimen;
- a detector that detects an electromagnetic wave emitted from the specimen;
- a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on a detection solid angle of the detector are associated with each other;
- a tilt control unit that controls the tilt mechanism;
- a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table;
- and
- a display control unit that causes a display unit to display an image based on the detection solid-angle information,
- wherein the detection solid-angle information indicates a detection solid angle as a ratio of a detection solid angle to a maximum detection solid angle obtained by the detector.
5 more elements
A charged particle beam apparatus comprising:
- a tilt mechanism that tilts a specimen;
- a detector that detects an electromagnetic wave emitted from the specimen;
- a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on a detection solid angle of the detector are associated with each other;
- a tilt control unit that controls the tilt mechanism;
- a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table;
- and
- a measurement time setting unit that sets a measurement time for detecting the electromagnetic wave by using the detector,
- wherein the measurement time setting unit sets the measurement time based on the detection solid-angle information.
5 more elements
A charged particle beam apparatus comprising:
- a tilt mechanism that tilts a specimen;
- a detector that detects an electromagnetic wave emitted from the specimen;
- a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on a detection solid angle of the detector are associated with each other;
- a tilt control unit that controls the tilt mechanism;
- a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table;
- and
- a notification unit that notifies warning information when a detection solid angle indicated by the detection solid-angle information is smaller than a threshold.
4 more elements
A charged particle beam apparatus comprising:
- a tilt mechanism that tilts a specimen;
- a detector that detects an electromagnetic wave emitted from the specimen;
- a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on a detection solid angle of the detector are associated with each other;
- a tilt control unit that controls the tilt mechanism;
- a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table;
- a specimen stage including the tilt mechanism;
- a first specimen holder that is attachable to the specimen stage and holds the specimen;
- and
- a second specimen holder that is attachable to the specimen stage, holds the specimen, and has a different shape from the first specimen holder, wherein
- the table storage unit stores two of the tables,
- in a first table of the two tables, the tilt angle information and the detection solid-angle information in the first specimen holder are associated with each other, and
- in a second table of the two tables, the tilt angle information and the detection solid-angle information in the second specimen holder are associated with each other.
9 more elements
A charged particle beam apparatus comprising:
- a tilt mechanism that tilts a specimen;
- a detector that detects an electromagnetic wave emitted from the specimen;
- a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on a detection solid angle of the detector are associated with each other;
- a tilt control unit that controls the tilt mechanism;
- and
- a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table, wherein
- the charged particle beam apparatus comprises two of the detectors,
- the table storage unit stores two of the tables,
- in a first table of the two tables, the tilt angle information and the detection solid-angle information in a first detector of the two detectors are associated with each other, and
- in a second table of the two tables, the tilt angle information and the detection solid-angle information in a second detector of the two detectors are associated with each other.
7 more elements
Dependencies are inferred from the claim text.