Deep learning based defect detection

A non-transitory computer-readable medium, storing program instructions executable on one or more computer systems for performing a computer-implemented method for detecting defects on a specimen, wherein the computer-implemented method comprises:

• for a location on a specimen, generating a gray scale simulated design data image from a high resolution image generated at the location, wherein the high resolution image is generated at the location by a high resolution imaging system, and wherein generating the gray scale simulated design data image is performed by a deep learning model included in one or more components executed by the one or more computer systems;
• generating a simulated binary design data image for the location from the gray scale simulated design data image;
• and
• detecting defects at the location on the specimen by subtracting design data for the location from the simulated binary design data image, wherein generating the simulated binary design data image and detecting the defects are performed by the one or more computer systems.

A computer-implemented method for detecting defects on a specimen, comprising:

• for a location on a specimen, generating a gray scale simulated design data image from a high resolution image generated at the location, wherein the high resolution image is generated at the location by a high resolution imaging system, and wherein generating the gray scale simulated design data image is performed by a deep learning model included in one or more components executed by one or more computer systems;
• generating a simulated binary design data image for the location from the gray scale simulated design data image;
• and
• detecting defects at the location on the specimen by subtracting design data for the location from the simulated binary design data image, wherein generating the simulated binary design data image and detecting the defects are performed by the one or more computer systems.