Contaminant detection system, contaminant detecting method, and semiconductor manufacturing apparatus
AssigneeTokyo Electron Limited
InventorsTsuyoshi Moriya, Yoshitaka Enoki, Tokio Toyama, Michihiro Takahashi, Takuya Mori
Life of this patent
Estimating the term…
Abstract
A contaminant detection system includes a light source configured to emit excitation light on an object to be inspected; a detector configured to detect fluorescence emitted from a contaminant adhering to the object to be inspected; and a processor. The fluorescence is caused by emission of the excitation light from the light source onto the object to be inspected. The processor is configured to perform a determination of a location of the contaminant and a type of the contaminant, based on the fluorescence emitted from the contaminant; and output a result of the determination.
Claims17
A contaminant detection system comprising:
- a light source configured to emit excitation light on an object to be inspected;
- a camera configured to detect fluorescence emitted from a contaminant adhering to the object to be inspected, the fluorescence being caused by exposure to the excitation light from the light source;
- a display device;
- and
- a processor configured to
- perform a determination of a location of the contaminant and a type of the contaminant, based on the fluorescence emitted from the contaminant;
- output a result of the determination;
- cause the display device to display the location of the contaminant adhering to the object and the type of the contaminant, as the result of the determination;
- during a cleaning work of the object by a user, cause the display device to display a first location on the object, to which the contaminant is adhering, in a first color, the first location being subject to cleaning by the cleaning work;
- and
- during the cleaning work of the object by the user, cause the display device to display at least a portion of the first location as a second location by changing a color from the first color to a second color, the at least a portion of the first location having already been cleaned by the user, the second color being a color different from the first color;
- and wherein the processor is further configured to
- perform the determination on the second location;
- and
- in response to the result of the determination that no contamination is present, cause the display device to display a third location on the object, in a third color different from the first color and the second color, the third location being at least a portion of the second location determined to be free of the contaminant.
The contaminant detection system according to claim wherein the excitation light is ultraviolet light.
A method of detecting a contaminant adhering to an object to be inspected, the method being performed by contaminant detection system, and the method comprising:
- emitting excitation light on the object to be inspected;
- detecting fluorescence emitted from the contaminant adhering to the object to be inspected, the fluorescence being caused by exposure to the excitation light;
- performing a determination of a location of the contaminant and a type of the contaminant, based on the fluorescence emitted from the contaminant;
- outputting a result of the determination;
- displaying the location of the contaminant adhering to the object and the type of the contaminant, as the result of the determination;
- during a cleaning work of the object by a user, displaying a first location on the object, to which the contaminant is adhering, in a first color, the first location being subject to cleaning by the cleaning work;
- and
- during the cleaning work of the object by the user, displaying at least a portion of the first location as a second location by changing a color from the first color to a second color, the at least a portion of the first location having already been cleaned by the user, the second color being a color different from the first color;
- and the method further comprising:
- performing the determination on the second location;
- and
- in response to the result of the determination that no contamination is present, displaying a third location on the object, in a third color different from the first color and the second color, the third location being at least a portion of the second location determined to be free of the contaminant.
A non-transitory computer-readable recording medium storing a computer program that causes a processor in a computer to perform a method comprising:
- emitting excitation light on an object to be inspected;
- detecting fluorescence emitted from a contaminant adhering to the object to be inspected, the fluorescence being caused by exposure to the excitation light from the light source;
- performing a determination of a location of the contaminant and a type of the contaminant, based on the fluorescence emitted from the contaminant;
- outputting a result of the determination;
- displaying the location of the contaminant adhering to the object and the type of the contaminant, as the result of the determination;
- during a cleaning work of the object by a user, displaying a first location on the object, to which the contaminant is adhering, in a first color, the first location being subject to cleaning by the cleaning work;
- and
- during the cleaning work of the object by the user, displaying at least a portion of the first location as a second location by changing a color from the first color to a second color, the at least a portion of the first location having already been cleaned by the user, the second color being a color different from the first color;
- and the method further comprising:
- performing the determination on the second location;
- and
- in response to the result of the determination that no contamination is present, displaying a third location on the object, in a third color different from the first color and the second color, the third location being at least a portion of the second location determined to be free of the contaminant.
Dependencies are inferred from the claim text.