System for deriving electrical characteristics and non-transitory computer-readable medium

A system for estimating electrical characteristics of an element formed on a sample from image data acquired from a charged particle beam apparatus, the system comprising:

• a computer system;
• and
• an arithmetic module that is executed by the computer system,
• wherein the computer system includes a learning device that outputs the electrical characteristics of the element as a learning result,
• the learning device executes learning in advance using teacher data including at least one among information regarding two or more characteristics extracted from two or more pieces of image data acquired from the charged particle beam apparatus under at least two image acquisition conditions including at least one of a blocking time between irradiations of the sample by a beam and an irradiation time of the beam when the sample is irradiated with the beam using the charged particle beam apparatus in a pulsatile manner, information generated from the two or more characteristics, at least two image acquisition conditions of the charged particle beam apparatus, an electrical resistance and a capacitance, and
• the arithmetic module calculates one of the electrical resistance and the capacitance by inputting, to the learning device, at least one among at least two pieces of image data acquired from the charged particle beam apparatus under at least two image acquisition conditions, two or more characteristics extracted from the two or more pieces of image data, information generated from the two or more characteristics, at least two image acquisition conditions of the charged particle beam apparatus, and another one of the electrical resistance and the capacitance.