Non-transitory computer-readable medium storing program code generating wafer map based on generative adversarial networks and computing device including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsWonik Jang, Sanghoon Myung, Changwook Jeong, Sunghee Lee
Life of this patent
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Abstract
A non-transitory computer-readable medium storing a program code including an image generation model, which when executed, causes a processor to input input data including sampling data of some of a plurality of semiconductor dies of a wafer to a generator network of the image generation model and output a wafer map indicating the plurality of semiconductor dies, and to input the wafer map output from the generator network to a discriminator network of the image generation model and discriminate the wafer map.
Claims19
A non-transitory computer-readable medium storing a program code including an image generation model, which when executed, causes a processor to:
- train a generator network of the image generation model to generate a wafer image by inputting input data including sampling data of some of a plurality of semiconductor dies of a wafer to the generator network of the image generation model;
- output a wafer map indicating the plurality of semiconductor dies generated during the training of the generator network;
- input the wafer map output from the generator network to a discriminator network of the image generation model such that the discriminator network discriminates the wafer map generated during the training;
- and
- perform additional training of the generator network based on a discrimination result of the discriminator network correctly differentiating the generated wafer map from a real wafer map.
A non-transitory computer-readable medium storing a program code including an image generation model, which when executed, causes a processor to:
- perform learning of a discriminator network of the image generation model so that the discriminator network discriminates a first wafer map including a plurality of sampling values measured from a plurality of semiconductor dies of a wafer as real and discriminates a second wafer map output from a generator network of the image generation model, to which some of the plurality of sampling values are input, as fake;
- and
- perform learning of the generator network so that the second wafer map output from the generator network is discriminated as real by the discriminator network.
A computing device comprising a processor configured to execute an image generation model stored in a memory, wherein the processor is configured to:
- perform learning of a discriminator network of the image generation model so that the discriminator network discriminates a first wafer map of a first wafer including a plurality of first sampling values measured from a plurality of first semiconductor dies of the first wafer as real and discriminates a second wafer map of the first wafer output from a generator network of the image generation model, to which some of the plurality of first sampling values are input, as fake;
- perform learning of the generator network so that the second wafer map output from the generator network is discriminated as real by the discriminator network;
- and
- input some of second sampling values measured from some of a plurality of second semiconductor dies of a second wafer to the generator network and generate a third wafer map of the second wafer.
Dependencies are inferred from the claim text.