US 11,773,480 B2Granted

MXene layers as substrates for growth of highly oriented perovskite thin films

AssigneeDrexel University

InventorsZongquan Gu, Babak Anasori, Andrew Lewis Bennett-Jackson, Matthias Falmbigl, Dominic Imbrenda, Yury Gogotsi, Jonathan E. Spanier

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Abstract

The present disclosure is directed to using MXene compositions as templates for the deposition of oriented perovskite films, and compositions derived from such methods. Certain specific embodiments include methods preparing an oriented perovskite, perovskite-type, or perovskite-like film, the methods comprising: (a) depositing at least one perovskite, perovskite-type, or perovskite-like composition or precursor composition using chemical vapor deposition (CVD), physical vapor deposition (PVD), or atomic layer deposition (ALD) onto a film or layer of a MXene composition supported on a substrate to form a layered composition or precursor composition; and either (b) (1) heat treating or annealing the layered precursor composition to form a layered perovskite-type structure comprising at least one oriented perovskite, perovskite-type, or perovskite-like composition; or (2) annealing the layered composition; or (3) both (1) and (2).

Claims8

Dependent claims

A structure comprising:

a stacked assembly of a dielectric substrate, a MXene layer, and at least one layer of an oriented-perovskite-structured material,
wherein the perovskite-structured material is disposed on the MXene layer,
wherein the perovskite-structured material has the formula of (i) BaTiO3, (ii) Am−1Bi2MmO3m+3, (iii) Am+1MmO3m+1, or (iv) AmMmO3m+2,
wherein when the perovskite-structured material has the formula of Am−1Bi2MmO3m+3, A=Bi3+, Ba2+, Sr2+, Ca2+, Pb2+, K+, or Na+, and M=Ti4+, Nb5+, Ta5−, Mo6+, W6+, or Fe3+,
wherein when the perovskite-structured material has the formula of Am+1MmO3m+1, A=Bi3+, Ba2+, Sr2+, Ca2+, Pb2+, K+, or Na+and M=Ti4+, Nb5+, Ta5−, Mo6+, W6 +, or Fe3+, and
wherein when the perovskite-structured material has the formula of AmMmO3m+2, A=Bi3+, Ba2+, Sr2+, Ca2+, Pb2+, K+, or Na+, and M=Ti4+, Nb5+, Ta5−, Mo6+, W6+, or Fe3+, and
wherein the MXene layer is sandwiched between the dielectric substrate and the at least one layer of oriented perovskite-structured material.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 16/756,337Filed 9 Oct 2018 · us provisional application
Priority: 16 Oct 2017
Published: US 2020/0240000 A130 Jul 2020
Granted: 3 Oct 2023
Term ends: Not estimatedThe source records don’t support an estimate.

Classification37 codes

C01B 32/921
Carbides of single elements: titanium carbide
C23C 14/088
Oxides: of the type ABO3 with A representing alkali, alkaline earth metal or Pb and B representing a refractory or rare earth metal
B32B 18/00
Layered products essentially comprising ceramics
C04B 35/4682
Based on barium titanates: based on BaTiO3 perovskite phase