Methods of forming microelectronic devices
OwnerHaitao Liu, Kunal R. Parekhinventors
Life of this patent
Estimating the term…
Loading patent…
OwnerHaitao Liu, Kunal R. Parekhinventors
Estimating the term…
A microelectronic device comprises a stack structure, cell pillar structures, an active body structure, digit line structures, and control logic devices. The stack structure comprises vertically neighboring tiers, each of the vertically neighboring tiers comprising a conductive structure and an insulative structure vertically neighboring the conductive structure. The cell pillar structures vertically extend through the stack structure and each comprise a channel material and an outer material stack horizontally interposed between the channel material and the stack structure. The active body structure vertically overlies the stack structure and is in contact with the channel material of the cell pillar structures. The active body structure comprises a metal material having a work function greater than or equal to about 4.7 electronvolts. The digit line structures vertically underlie the stack structure and are coupled to the cell pillar structures. Memory devices, electronic systems, and methods of forming a microelectronic device are also described.
A method of forming a microelectronic device, comprising:
A method of forming a microelectronic device, comprising:
A method of forming a microelectronic device, comprising:
Dependencies are inferred from the claim text.