Piezo-electric element
AssigneesNisshinbo Micro Devices Inc., Denso Corporation
InventorsHiroyuki Kuchiji, Naoki Masumoto, Hideo Yamada, Akihiko Teshigahara, Atsushi Mizutani
Life of this patent
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Abstract
A piezo-electric element includes a piezo-electric element part, a support part, and a stretchable film. The piezo-electric element part includes a piezo-electric film and electrodes between which the piezo-electric film is sandwiched in a thickness direction. The support part supports a peripheral portion of the piezo-electric element part. The stretchable film is provided in an oscillation region located inside of the peripheral portion of the piezo-electric element part. The stretchable film also has a higher elasticity than that of the piezo-electric element part.
Claims11
A piezo-electric element comprising:
- a piezo-electric element part including a piezo-electric film and electrodes, the piezo-electric film being sandwiched between the electrodes in a thickness direction;
- a support part supporting a peripheral portion of the piezo-electric element part;
- and
- a stretchable film (i) in an oscillation region inside of the peripheral portion of the piezo-electric element part and (ii) having a higher elasticity than the piezo-electric element part, wherein
- the piezo-electric element part has at least one end face in the thickness direction, and
- the stretchable film (i) covers the at least one end face in the oscillation region in the thickness direction and (ii) does not cover the at least one end face in the peripheral portion in the thickness direction.
A piezo-electric element comprising:
- a piezo-electric element part including a piezo-electric film and electrodes, the piezo-electric film being sandwiched between the electrodes in a thickness direction;
- a support part supporting a peripheral portion of the piezo-electric element part;
- and
- a stretchable film (i) in an oscillation region inside of the peripheral portion of the piezo-electric element part and (ii) having a higher elasticity than the piezo-electric element part;
- wherein
- the piezo-electric element part includes a slit in the oscillation region that penetrates the piezo-electric element part in the thickness direction,
- the stretchable film (i) covers at least a part of an opening of the slit in the oscillation region and (ii) integrates the oscillation region separated by the slit, and
- the slit includes (i) a covered region in which the opening is covered by the stretchable film and (ii) a non-covered region in which the opening is not covered by the stretchable film.
Dependencies are inferred from the claim text.