Terahertz wave camera and detection module
AssigneeCanon Kabushiki Kaisha
InventorsTakeaki Itsuji, Noriyuki Kaifu
Life of this patent
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Abstract
A terahertz wave camera that acquires information on a measurement target includes: a sensor unit in which a plurality of elements having spectral sensitivity to the terahertz wave are arranged; a readout circuit unit that reads out signals from the elements; a first light-shielding portion; and an optical unit. The first light-shielding portion reduces disturbance light to which the readout circuit unit has spectral sensitivity. The optical unit guides a terahertz wave from the measurement target to the sensor unit.
Claims38
A terahertz wave camera that detects a terahertz wave from a measurement target and acquires information on the measurement target, the terahertz wave camera comprising:
- a sensor in which a plurality of detection elements having spectral sensitivity to the terahertz wave are arranged, each including an antenna;
- a readout circuit configured to read out signals from the plurality of detection elements;
- a first light-shielding portion configured to (a) reduce disturbance light to which the readout circuit has spectral sensitivity and (b) serve as an optical element having an optical power configured to guide a terahertz wave from the measurement target to the sensor, and
- a second light-shielding portion configured to (a) reduce the disturbance light that is reduced by the first light-shielding portion and (b) transmit the terahertz wave, the second light-shielding portion being arranged between the first light-shielding portion and the sensor,
- wherein in a cross-section view, the first light-shielding portion and the second light-shielding portion are arranged crossing an optical axis of the terahertz wave camera.
A detection module used for a terahertz wave camera that detects a terahertz wave from a measurement target and acquires information on the measurement target, the detection module comprising:
- a sensor substrate;
- a plurality of detection elements provided on a first primary face of the sensor substrate and having spectral sensitivity to the terahertz wave;
- a first light-shielding portion configured to reduce disturbance light other than the terahertz wave, the first light-shielding portion being arranged in a different level from the plurality of detection elements in a sectional view of the sensor substrate;
- a second light-shielding portion configured to (a) reduce the disturbance light reduced by the first light-shielding portion and (b) transmit the terahertz wave;
- a readout circuit substrate provided so as to face a second primary face of the sensor substrate;
- and
- a readout circuit that is provided on the readout circuit substrate, the readout circuit having spectral sensitivity to the disturbance light, and the readout circuit being configured to read out signals from the plurality of detection elements,
- wherein the second light shielding portion is provided on an area of the readout circuit which extends beyond the sensor substrate in a plan view, and
- wherein the second light-shielding portion is thicker than the sensor substrate in a sectional view.
A terahertz wave camera that detects a terahertz wave from a measurement target and that acquires information on the measurement target, the terahertz wave camera comprising:
- a sensor in which a plurality of detection elements having spectral sensitivity to the terahertz wave are arranged;
- a readout circuit configured to read out signals from the plurality of detection elements;
- a first light-shielding portion configured to reduce disturbance light to which the readout circuit has spectral sensitivity;
- an optical element configured to guide a terahertz wave from the measurement target to the sensor, and
- a second light-shielding portion configured to (a) reduce the disturbance light that is reduced by the first light-shielding portion and (b) transmit the terahertz wave, the second light-shielding portion being (i) arranged between the first light-shielding portion and the sensor and (ii) arranged between the optical element and the sensor,
- wherein the sensor includes an antenna and a third light-shielding portion, with the antenna being arranged between the second light-shielding portion and the third light-shielding portion.
A terahertz wave camera comprising:
- a sensor in which a plurality of detection elements having spectral sensitivity to the terahertz wave are arranged;
- a readout circuit configured to read out signals from the plurality of detection elements;
- a first scattering portion configured to scatter disturbance light to which the readout circuit has spectral sensitivity;
- a second scattering portion configured to scatter the disturbance light, the second light-shielding portion being arranged between the first scattering portion and the sensor,
- wherein the first scattering portion and the second light-shielding portion are arranged crossing an optical axis of the terahertz wave camera.
Dependencies are inferred from the claim text.