Vertical-cavity surface-emitting laser (VCSEL) tuned through application of mechanical stress via a piezoelectric material

A method for manufacturing a tunable VCSEL, the method comprising:

• providing a substrate, wherein a piezoelectric material is at least partially embedded within at least a first section of the substrate;
• forming a VCSEL emission structure on the first section and a second section of the substrate, the VCSEL emission structure defining an emission axis, the piezoelectric material disposed between the substrate and the VCSEL emission structure in a direction parallel to the emission axis in the first section of the substrate;
• depositing a piezoelectric electrode on a surface of the piezoelectric material;
• and
• depositing a stiff material about a periphery of an active cavity material structure of the VCSEL emission structure such that the stiff material is disposed on at least two sides of the VCSEL emission structure, the stiff material mechanically coupled to the piezoelectric material and to the periphery of the active cavity material structure of the VCSEL emission structure such that the piezoelectric material is mechanically coupled to the VCSEL emission structure by the stiff material around the periphery of the active cavity material structure of the VCSEL emission structure, such that when the piezoelectric material experiences a mechanical stress, the mechanical stress is transferred as a radial mechanical stress imparted into the active cavity material structure of the VCSEL emission structure.