Method and an apparatus for treating a surface of a TCO material, in a semiconductor device
AssigneeNewSouth Innovations Pty Limited
InventorsAlison Joan Lennon, Vincent Akira Allen
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Abstract
The present disclosure provides a method for treating a surface portion of a TCO material in a semiconductor device that comprises a structure arranged to facilitate current flow in one direction. To perform the method the surface portion of the TCO is exposed to an electrolyte and a current is induced in the device. The current allows reducing the TCO material in a manner such that the adhesion of a metallic material to the exposed surface portion is improved over the adhesion of the metallic material to a non-exposed surface portion.
Claims18
A method for treating a plurality of portions of a surface of a TCO layer in a semiconductor device, the semiconductor device comprising a structure arranged to facilitate current flow in one direction, the method comprising the steps of:
- exposing the plurality of surface portions of the TCO layer to an electrolyte, the exposed surface portions comprising finger portions for adherence with finger electrodes, there being a non-exposed surface region of the TCO layer between each pair of adjacent finger portions, the electrolyte being suitable for electrochemically reducing each exposed surface portion of the TCO layer when an electrical current is induced through the TCO layer;
- and
- inducing a current in the TCO layer by inducing a current in the semiconductor device, the induced current being directed transversally to the exposed surface portions of the TCO layer and being substantially uniform across all exposed surface portions of the surface of the TCO layer;
- wherein the substantially uniform induced current reduces the exposed surface portions of the TCO layer, such that the TCO layer includes TCO material at the exposed surface portions and the TCO material at the exposed surface portions has substantially uniformly reduced surfaces, and improves uniformity of adhesion of a metallic material to each exposed surface portion in comparison to adhesion of the metallic material to the non-exposed regions of the TCO layer;
- wherein the reduction at the plurality of exposed surface portions of the TCO layer is induced by exclusive contact of the exposed surface portions with the electrolyte.
A method for plating a metallic material to a surface of a TCO layer in a semiconductor device, the semiconductor device comprising a p-n junction, the method comprising the steps of:
- exposing a plurality of portions of the surface of the TCO layer to an electrolyte that is suitable for electrochemically reducing the TCO layer when an electrical current is induced through the TCO layer, the surface portions comprising finger portions for adherence with finger electrodes, there being a non-exposed surface region of the TCO layer between each pair of adjacent finger portions;
- and
- inducing a current in the TCO layer by biasing the p-n junction, the induced current being directed transversally to the exposed surface portions of the TCO layer and being substantially uniform across all exposed surface portions of the surface of the TCO layer;
- allowing for the surface of the TCO layer to be reduced in a substantially uniform manner by the current and the electrolyte such that uniformity of adhesion of the metallic material to the exposed surface is improved;
- and
- plating the metallic material to the surface of the TCO layer;
- wherein the reduction at the plurality of exposed surface portions of the TCO layer is induced by exclusive contact with the electrolyte.
Dependencies are inferred from the claim text.