Heterojunction structure-based solar cell and manufacturing method thereof

A method for manufacturing a heterojunction structure based solar cell, the method comprising:

• preparing an n-type semiconductor substrate;
• texturing at least one of a front surface or a rear surface of the n-type semiconductor substrate;
• forming a p-type non-oxide semiconductor material layer of CuI on the n-type semiconductor substrate to form a p-n junction;
• forming a transition metal oxide film directly on the p-type non-oxide semiconductor material layer of CuI;
• and
• forming a front electrode and a rear electrode,
• wherein the transition metal oxide layer protects the p-type non-oxide semiconductor material layer of CuI,
• wherein the transition metal oxide film is formed using one of thermal evaporation, e-beam evaporation, and atomic layer deposition, and
• wherein a thickness of the transition metal oxide film is smaller than 10 nm.