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US 11,769,707 B2Granted
Semiconductor structure and fabrication method thereof
AssigneesSemiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation Please
InventorFei Zhou
Life of this patent
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Abstract
A semiconductor structure is provided. The semiconductor structure includes: a fin heat-dissipation region on a substrate; a fin channel part on the fin heat-dissipation region, and an isolation structure on the substrate. A width of the fin channel part is smaller than a width of the fin heat-dissipation region. A top surface of the isolation structure is coplanar with a top surface of the fin heat-dissipation region.
Claims7
A semiconductor structure, comprising:
- a fin heat-dissipation region on a substrate, the substrate including a base substrate and a fin substrate on the base substrate, and the fin heat-dissipation region surrounding and completely covering a top surface of the fin substrate and side surfaces of the fin substrate;
- a fin channel part on the fin heat-dissipation region, wherein a width of the fin channel part is smaller than a width of the fin heat-dissipation region;
- and
- an isolation structure on the substrate, wherein a top surface of the isolation structure is coplanar with a top surface of the fin heat-dissipation region, and a bottom surface of the isolation structure is coplanar with a bottom surface of the fin heat-dissipation region, coplanar with a top surface of the base substrate, and lower than the topmost surface of the fin substrate.
1 more element
Dependencies are inferred from the claim text.