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US 11,769,683 B2Granted
Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen
AssigneeApplied Materials, Inc.
InventorsWendell Glenn Boyd, Jr., Vijay D. Parkhe, Teng-Fang Kuo, Zhenwen Ding
Life of this patent
Estimating the term…
Abstract
A coated chamber component comprises a body and a protective ceramic coating deposited over a surface of the body, the protective ceramic coating being amorphous and comprising about 8-20% by weight yttrium, about 20-32% by weight aluminum, and about 60-70% by weight oxygen.
Claims20
A coated chamber component comprising:
- a body;
- and
- a protective ceramic coating deposited over a surface of the body, the protective ceramic coating being amorphous and comprising about 8-20% by weight yttrium, about 20-32% by weight aluminum, and about 60-70% by weight oxygen.
Dependencies are inferred from the claim text.