Apparatus for plasma dicing
OwnerGautham Ragunathan, David Tossell +1inventors
InventorsGautham Ragunathan, David Tossell, Oliver Ansell
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Abstract
An apparatus is for plasma dicing a semiconductor substrate of the type forming part of a workpiece, the workpiece further including a carrier sheet on a frame member, where the carrier sheet carries the semiconductor substrate. The apparatus includes a chamber, a plasma production device configured to produce a plasma within the chamber suitable for dicing the semiconductor substrate, a workpiece support located in the chamber for supporting the workpiece through contact with the carrier sheet, and a frame cover element configured to, in use, contact the frame member thereby clamping the carrier sheet against an auxiliary element disposed in the chamber.
Claims16
An apparatus for plasma dicing a semiconductor substrate of the type forming part of a workpiece, the workpiece further comprising a carrier sheet on a frame member, wherein the carrier sheet carries the semiconductor substrate, the apparatus comprising:
- a chamber;
- a plasma production device configured to produce a plasma within the chamber suitable for dicing the semiconductor substrate;
- a workpiece support located in the chamber for supporting the workpiece through contact with the carrier sheet;
- a shield ring disposed around the workpiece support;
- a frame cover element configured to, in use, contact the frame member thereby clamping the carrier sheet against the workpiece support, wherein the workpiece support with the shield ring is wider than an opening defined by the frame cover element;
- a heat shield disposed over the frame cover element to thermally shield the frame cover element from the plasma, wherein the frame cover element is formed from a material with a higher thermal conductivity than that of the heat shield;
- and
- a plurality of contact points between the heat shield and the frame cover element, wherein the contact points are configured to minimize a thermal pathway between the heat shield and the frame cover element.
Dependencies are inferred from the claim text.