Back to results
US 11,769,667 B2Granted
Template, method for producing template, and method for producing semiconductor device
AssigneeKioxia Corporation
InventorTakeshi Higuchi
Life of this patent
Estimating the term…
Abstract
According to one embodiment, a template for nanoimprint lithography includes a substrate having a main surface and a mesa structure on the main surface. The mesa structure has an upper surface that can be patterned with recesses or the like. A film containing a quantum dot or quantum dots is on the main surface other than the upper surface of the mesa structure. The quantum dot can absorb ultraviolet light and emit visible light.
Claims20
A template for nanoimprinting, the template comprising:
- a substrate having a first main surface;
- a mesa structure protruding from the first main surface in a first direction orthogonal to the first main surface, the mesa structure having a first surface parallel to the first main surface and spaced from the first main surface in the first direction;
- and
- a film containing quantum dots on the first main surface of the substrate outside of the mesa structure, wherein
- the first surface of the mesa structure includes a nanoimprint transfer pattern thereon, and
- the mesa structure is comprised of the same material as the substrate.
3 more elements
A method for producing a semiconductor device, the method comprising:
- applying a photocurable imprint resist material to a semiconductor substrate;
- bringing a template into contact with photocurable imprint resist material;
- curing the photocurable imprint resist material;
- and
- separating the template from the cured photocurable imprint resist material, wherein
- the template comprises:
- a substrate having a main surface;
- a mesa structure protruding from the main surface in a first direction orthogonal to the main surface, the mesa structure having a first surface parallel to the main surface and spaced from the main surface in the first direction;
- and
- a film containing quantum dots on the main surface of the substrate outside of the mesa structure,
- the first surface of the mesa structure includes a nanoimprint transfer pattern thereon, and
- the mesa structure is comprised of the same material as the substrate.
9 more elements
Dependencies are inferred from the claim text.