Ion source gas injection beam shaping
AssigneeApplied Materials, Inc.
InventorAdam M. McLaughlin
Life of this patent
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Abstract
An ion source for extracting a ribbon ion beam with improved height uniformity is disclosed. Gas nozzles are disposed in the chamber proximate the extraction aperture. The gas that is introduced near the extraction aperture serves to shape the ribbon ion beam as it is being extracted. For example, the height of the ribbon ion beam may be reduced by injecting gas above and below the ion beam so as to compress the extracted ion beam in the height direction. In some embodiments, the feedgas is introduced near the extraction aperture. In other embodiments, a shield gas, such as an inert gas, is introduced near the extraction aperture.
Claims20
An ion source comprising:
- a chamber comprising a first end, a second end and a plurality of walls connecting the first end and the second end, wherein one of the plurality of walls is an extraction plate having an extraction aperture having a width greater than its height;
- a plasma generator to generate a plasma within the chamber;
- a gas inlet in communication with gas channels;
- a supply channel in communication with the gas inlet to supply feedgas to the chamber;
- and
- gas nozzles disposed within the chamber near the extraction aperture, in communication with the gas channels to provide a flow of feedgas near the extraction aperture so as to shape an ion beam extracted from the ion source.
An ion source comprising:
- a chamber comprising a first end, a second end and a plurality of walls connecting the first end and the second end, wherein one of the plurality of walls is an extraction plate having an extraction aperture having a width greater than its height;
- a plasma generator to generate a plasma within the chamber;
- a gas inlet in communication with gas channels;
- gas nozzles disposed within the chamber near the extraction aperture, in communication with the gas channels so as to shape an ion beam extracted from the ion source;
- and
- a second gas inlet in communication with a supply channel to supply feedgas to the chamber;
- wherein the supply channel and the gas channels are not in fluid communication with one another.
Dependencies are inferred from the claim text.