Loading patent…
AssigneeASML Netherlands B.V.
InventorsWentian Zhou, Liangjiang Yu, Teng Wang, Lingling Pu, Wei Fang
Estimating the term…
Disclosed herein is a method of automatically obtaining training images to train a machine learning model that improves image quality. The method may comprise analyzing a plurality of patterns of data relating to a layout of a product to identify a plurality of training locations on a sample of the product to use in relation to training the machine learning model. The method may comprise obtaining a first image having a first quality for each of the plurality of training locations, and obtaining a second image having a second quality for each of the plurality of training locations, the second quality being higher than the first quality. The method may comprise using the first image and the second image to train the machine learning model.
An apparatus for automatically obtaining training images to train a machine learning model that improves image quality, the apparatus comprising:
A non-transitory computer readable medium storing a set of instructions that is executable by a controller of a device to cause the device to perform a method comprising:
A method of automatically obtaining training images for use in training a machine learning model, the method comprising:
Dependencies are inferred from the claim text.