Mode selection and defect detection training

A method for performing optical mode selection and defect detection training comprising:

• receiving defect data of at least one defect on at least a portion of at least one sample;
• receiving at least one image from an inspection sub-system and storing the at least one image in a dataset, wherein the at least one image is associated with the at least one defect detected on the at least the portion of the at least one sample by the inspection sub-system configured with a candidate optical mode of a plurality of candidate optical modes;
• selecting one or more optical modes from the plurality of candidate optical modes by performing a mode selection model;
• training a defect detection model with the images associated with the one or more optical modes selected by the mode selection model;
• and
• performing a defect inspection test.

A system comprising:

• an inspection sub-system configured to image at least one sample while being configured with a plurality of candidate optical modes;
• a controller communicatively coupled to the inspection sub-system, the controller including one or more processors configured to execute program instructions causing the one or more processors to jointly perform optical mode selection and defect detection training by iteratively:
• receiving defect data of at least one defect on at least a portion of the at least one sample;
• receiving at least one image from the inspection sub-system and storing the at least one image in a dataset, wherein the at least one image is associated with the at least one defect detected on the at least the portion of the at least one sample by the inspection sub-system configured with a candidate optical mode of the plurality of candidate optical modes;
• selecting one or more optical modes from the plurality of candidate optical modes by performing a mode selection model;
• and
• training a defect detection model with images associated with the one or more selected optical modes;
• wherein the one or more processors are further configured to determine at least one run-time optical mode from the plurality of candidate optical modes.