Optimum sampling search system and method with risk assessment, and graphical user interface

An optimum sampling search method with risk estimation, wherein the optimum sampling search method is used for obtaining a target process parameter of a thin film process or a target operating parameter of a chemical process and the optimum sampling search method comprises:

• obtaining at least one objective function outputting value and at least one constraint function outputting value according to at least one executed sampling parameter corresponding the target process parameter or the target operating parameter, wherein the at least one executed sampling parameter includes at least one of RF energy, an amount of SiH4, an amount of NH3, an amount of chemicals added, a cooling water control condition and a circulating reflux ratio;
• obtaining an objective satisfaction score model according to the at least one executed sampling parameter and the at least one objective function outputting value;
• obtaining a constraint satisfaction probability model according to the at least one sampling parameter and the at least one constraint function outputting value;
• obtaining a recommended sampling parameter corresponding the target process parameter or the target operating parameter according to the objective satisfaction score model, wherein the recommended sampling parameter includes at least one of RF energy, an amount of SiH4, an amount of NH3, an amount of chemicals added, a cooling water control condition and a circulating reflux ratio;
• estimating a constraint satisfaction probability of the recommended sampling parameter according to the recommended sampling parameter and the constraint satisfaction probability model;
• outputting the recommended sampling parameter for being the target process parameter or the target operating parameter, if the constraint satisfaction probability of the recommended sampling parameter is larger than or equal to a first predetermined value;
• and
• adjusting the recommended sampling parameter to optimize the constraint satisfaction probability model, if the constraint satisfaction probability of the recommended sampling parameter is between the first predetermined value and a second predetermined value;
• wherein the constraint function outputting value is a value satisfying a constraint of the target process parameter or the target operating parameter, and the constraint satisfaction probability is a probability that the recommended sampling parameter satisfies an unknown constraint.

A display, wherein the display is used for obtaining a target process parameter of a thin film process or a target operating parameter of a chemical process via a graphical user interface, and the graphical user interface comprises:

• an objective satisfaction score model window, used for displaying an objective satisfaction score model, wherein the objective satisfaction score model is obtained according to at least one executed sampling parameter corresponding the target process parameter or the target operating parameter and at least one objective function outputting value, wherein the at least one executed sampling parameter includes at least one of RF energy, an amount of SiH4, an amount of NH3, an amount of chemicals added, a cooling water control condition and a circulating reflux ratio;
• a constraint satisfaction probability model window, used for displaying a constraint satisfaction probability model, wherein the constraint satisfaction probability model is obtained according the at least one executed sampling parameter and at least one constraint function outputting value;
• and
• a sampling information window, used for displaying a recommended sampling parameter corresponding the target process parameter or the target operating parameter and a constraint satisfaction probability, wherein the recommended sampling parameter is obtained according to the objective satisfaction score model, the constraint satisfaction probability is obtained according to the recommended sampling parameter and the constraint satisfaction probability model, and the recommended sampling parameter includes at least one of RF energy, an amount of SiH4, an amount of NH3, an amount of chemicals added, a cooling water control condition and a circulating reflux ratio;
• wherein the constraint function outputting value is a value satisfying a constraint of the target process parameter or the target operating parameter, and the constraint satisfaction probability is a probability that the recommended sampling parameter satisfies an unknown constraint.