Parameter sensing and computer modeling for gas delivery health monitoring

A system comprising:

• a memory;
• a plurality of sensors located along a delivery line that delivers a liquid as a gas to one of a gas panel or a processing chamber, the delivery line comprising a plurality of sections, including elbows and zones;
• and
• a processing device, operatively coupled to the memory and to the plurality of sensors, the processing device to:
• receive measurement data from the plurality of sensors;
• simulate, executing a computer-generated model, one or more process parameters related to the delivery line;
• compare the measurement data for a section of the plurality of sections with values of the one or more process parameters corresponding to the section;
• determine, based on at least a threshold deviation between the measurement data and the values of the one or more process parameters for the section, that a fault exists that is associated with maintaining temperature and pressure within the section of the delivery line consistent with a gaseous state of the liquid;
• and
• responsive to determining the fault, at least one of:
• causing processing within the processing chamber to be halted;
• or
• alerting an operator of the fault via an input/output device coupled to the processing device.

A non-transitory computer-readable medium storing instructions, which when executed by a processing device, perform a plurality of operations comprising:

• receiving measurement data from multiple sensors positioned along a delivery line that delivers a liquid as a gas to a processing chamber, wherein the delivery line comprises a plurality of sections, including elbows and zones;
• simulating, by executing a computer-generated model, one or more process parameters related to the delivery line and a plurality of heater jackets positioned around the delivery line;
• comparing the measurement data for a section of the plurality of sections with values of the one or more process parameters corresponding to the section;
• determining, based on at least a threshold deviation between the measurement data and the values of the one or more process parameters for the section, that a fault exists that is associated with maintaining temperature and pressure within the section of the delivery line consistent with a gaseous state of the liquid;
• and
• responsive to determining the fault, at least one of:
• causing processing within the processing chamber to be halted;
• or
• alerting an operator of the fault via an input/output device coupled to the processing device.