Estimation device, display control device, estimation system, and estimation method

An estimation system comprising an estimation device,

• the estimation device extracting a first data set from a history data in semiconductor manufacturing, the history data including a plurality of wafer data, each of the wafer data including a wafer ID, an inspection result of a wafer, a product type of the wafer, and an equipment history indicating a flow of the wafer in a plurality of equipment, the first data set including a part of the plurality of wafer data assigned a first inspection result,
• the estimation device estimating, based on the first data set, an overall relevance indicating a relevancy to the first data set for each of the plurality of equipment,
• the estimation device generating a plurality of partial data sets by splitting the first data set for each of a plurality of the product types,
• the estimation device estimating, based on a part of a plurality of the equipment histories, a partial relevance indicating a relevancy to each of the partial data sets for each of the plurality of equipment,
• the estimation device being configured to display a plurality of the overall relevances and a plurality of the partial relevances.