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US 11,768,367 B2Granted
Structures for piezoelectric actuator to increase displacement and maintain stiffness
AssigneeBeijing Voyager Technology Co., Ltd.
InventorsSae Won Lee, Youmin Wang, Yufeng Wang
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Abstract
A piezoelectric actuator including an anchor, an elastic layer having a first end coupled to the anchor, and a piezoelectric layer on the elastic layer. The elastic layer includes a solid sublayer including an elastic material and a second sublayer including a plurality of cavities. The piezoelectric layer is on the second sublayer of the elastic layer and includes a top electrode, a bottom electrode, and a piezoelectric material layer between the top electrode and the bottom electrode.
Claims18
A micro-mirror assembly comprising:
- a substrate;
- a first piezoelectric actuator coupled to the substrate;
- a second piezoelectric actuator coupled to the substrate;
- and
- a micro-mirror positioned between the first piezoelectric actuator and the second piezoelectric actuator, the micro-mirror including:
- a first edge coupled to the first piezoelectric actuator;
- and
- a second edge opposing the first edge and coupled to the second piezoelectric actuator,
- wherein each of the first piezoelectric actuator and the second piezoelectric actuator comprises:
- an elastic layer comprising:
- a solid sublayer including an elastic material;
- and
- a second sublayer including a plurality of cavities;
- and
- a piezoelectric layer on the second sublayer of the elastic layer,
- wherein each of the plurality of cavities is characterized by a height greater than a threshold value or greater than a half of a thickness of the solid sublayer of the elastic layer.
13 more elements
A piezoelectric actuator comprising:
- an anchor;
- an elastic layer having a first end coupled to the anchor, the elastic layer comprising:
- a solid sublayer including an elastic material;
- and
- a second sublayer including a plurality of cavities;
- and
- a piezoelectric layer on the second sublayer of the elastic layer, the piezoelectric layer comprising:
- a top electrode;
- a bottom electrode;
- and
- a piezoelectric material layer between the top electrode and the bottom electrode,
- wherein each of the plurality of cavities is characterized by a height greater than a threshold value or greater than a half of a thickness of the solid sublayer.
9 more elements
Dependencies are inferred from the claim text.