Laser radiation system and method for manufacturing electronic device

A method for manufacturing an electronic device, the method comprising:

• producing a pulse laser flux by using a laser radiation system;
• and
• processing a processing receiving material by irradiating the processing receiving material with the pulse laser flux produced by the laser radiation system,
• the laser radiation system including
• a laser apparatus configured to output a first pulse laser flux,
• a first optical system configured to shape a beam cross-sectional shape of the first pulse laser flux to convert the first pulse laser flux into a second pulse laser flux and transfer the second pulse laser flux onto a transfer position,
• a multimirror device arranged at the transfer position of the first optical system and including a plurality of mirrors, configured to be capable of controlling an angle of an attitude of each of the plurality of mirrors, and configured to divide the second pulse laser flux into a plurality of pulse laser fluxes and reflect the plurality of pulse laser fluxes in a plurality of directions to produce the plurality of divided pulse laser fluxes,
• a Fourier transform optical system configured to focus the plurality of divided pulse laser fluxes, and
• a control section configured to control the angle of the attitude of each of the plurality of mirrors in such a way that the Fourier transform optical system superimposes the plurality of pulse laser fluxes, which are divided by the mirrors separate from each other by at least a spatial coherence length of the second pulse laser flux, on one another,
• wherein the control section is configured to
• set a plurality of coherence cells based on the spatial coherence length of the second pulse laser flux,
• segment an arrangement of the plurality of mirrors of the multimirror device into a plurality of mirror arrangement regions in correspondence with the coherence cells to specify the mirror arrangement regions including the plurality of mirrors for each of the coherence cells, and
• select one mirror from each of the plurality of coherence cells and control the angle of the attitude of each of the plurality of mirrors in such a way that the selected mirrors reflect the pulse laser fluxes in the same direction, and
• wherein the coherence cells are each a region larger than or equal to a quadrangle having a first side having a spatial coherence length in a first axial direction out of two axial directions perpendicular to each other and a second side having a spatial coherence length in a second axial direction out of the two axial directions.

A laser radiation system comprising:

• a laser apparatus configured to output a first pulse laser flux;
• a first optical system configured to shape a beam cross-sectional shape of the first pulse laser flux to convert the first pulse laser flux into a second pulse laser flux and transfer the second pulse laser flux onto a transfer position;
• a multimirror device arranged at the transfer position of the first optical system and including a plurality of mirrors, configured to be capable of controlling an angle of an attitude of each of the plurality of mirrors, and configured to divide the second pulse laser flux into a plurality of pulse laser fluxes and reflect the plurality of pulse laser fluxes in a plurality of directions to produce the plurality of divided pulse laser fluxes;
• a Fourier transform optical system configured to focus the plurality of divided pulse laser fluxes;
• a wavefront sensor configured to measure a traveling direction and an optical intensity of a pulse laser flux in each position in a beam cross section of the second pulse laser flux;
• and
• a control section configured to control the angle of the attitude of each of the plurality of mirrors based on the traveling direction and the optical intensity of the pulse laser flux in each position in the beam cross section measured by the wavefront sensor,
• wherein the control section is configured to
• set a plurality of coherence cells based on a spatial coherence length of the second pulse laser flux,
• segment an arrangement of the plurality of mirrors of the multimirror device into a plurality of mirror arrangement regions in correspondence with the coherence cells to specify the mirror arrangement regions including the plurality of mirrors for each of the coherence cells, and
• select one mirror from each of the plurality of coherence cells and control the angle of the attitude of each of the plurality of mirrors in such a way that the selected mirrors reflect the pulse laser fluxes in the same direction, and
• wherein the coherence cells are each a region larger than or equal to a quadrangle having a first side having a spatial coherence length in a first axial direction out of two axial directions perpendicular to each other and a second side having a spatial coherence length in a second axial direction out of the two axial directions.