Couplers including a waveguide core with integrated airgaps
AssigneeGlobalFoundries U.S. Inc.
InventorsSpencer Porter, Mark Levy, Siva P. Adusumilli, Yusheng Bian
Life of this patent
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Abstract
Structures for a coupler and methods of forming a structure for a coupler. A structure for a directional coupler may include a first waveguide core having one or more first airgaps and a second waveguide core including one or more second airgaps. The one or more second airgaps are positioned in the second waveguide core adjacent to the one or more first airgaps in the first waveguide core. A structure for an edge coupler is also provided in which the waveguide core of the edge coupler includes one or more airgaps.
Claims20
A structure for a directional coupler, the structure comprising:
- a first waveguide core including one or more first airgaps, a first top surface, a first plurality of openings arranged between the first top surface and the one or more first airgaps, and a collar inside each of the first plurality of openings, each of the one or more first airgaps extending outwardly from respective bottoms of first plurality of openings;
- and
- a second waveguide core including one or more second airgaps, the one or more second airgaps positioned in the second waveguide core adjacent to the one or more first airgaps in the first waveguide core.
A structure for an edge coupler, the structure comprising:
- an interposer;
- an optical component;
- and
- a waveguide core arranged between the interposer and the optical component, the waveguide core including one or more first airgaps, a top surface, a plurality of openings arranged between the top surface and the one or more first airgaps, and a dielectric collar inside each of the plurality of openings, and each of the one or more first airgaps extending outwardly from respective bottoms of plurality of openings.
A method of forming a directional coupler, the method comprising:
- forming a first waveguide core and a second waveguide core;
- forming a plurality of openings in the first waveguide core;
- forming a dielectric collar that is positioned inside each of the plurality of openings,
- forming one or more first airgaps in the first waveguide core, wherein the plurality of openings are arranged between a top surface of the first waveguide core and the one or more first airgaps, and each of the one or more first airgaps extends outwardly from respective bottoms of plurality of openings;
- and
- forming one or more second airgaps in the second waveguide core,
- wherein the one or more second airgaps are positioned in the second waveguide core adjacent to the one or more first airgaps in the first waveguide core.
Dependencies are inferred from the claim text.