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US 11,768,322 B2Granted
Grating part and manufacturing method thereof
AssigneeMitutoyo Corporation
InventorsToshihiko Aoki, Kosaku Miyake
Life of this patent
Estimating the term…
Abstract
A grating part includes a first transparent substrate having an optical grating on a first principal surface and a second transparent substrate having an optical grating on a first principal surface; a second principal surface of the first substrate on an opposite side from the first principal surface and a second principal surface of the second substrate on an opposite side from the first principal surface are bonded.
Claims6
A grating part comprising:
- a first transparent substrate having an optical grating provided on a first principal surface thereof;
- and
- a second transparent substrate having an optical grating provided on a first principal surface thereof, wherein:
- a second principal surface of the first transparent substrate on an opposite side of the first principal surface of the first transparent substrate, and a second principal surface of the second transparent substrate on an opposite side from the first principal surface of the second transparent substrate are bonded,
- the second principal surface of the first transparent substrate and the second principal surface of the second transparent substrate are bonded by any of room temperature bonding, diffusion bonding, or anodic bonding such that the grating part is unaffected by changes in ambient temperature,
- the optical grating provided on the second transparent substrate further includes a first optical grating portion and a second optical grating portion, the first optical grating portion and the second optical grating portion are provided on separate portions of the first principal surface of the second transparent substrate, and a portion provided between the first optical grating portion and the second optical grating portion on the first principal surface of the second transparent substrate does not include optical grating, and
- the optical grating provided on the first principal surface of the first transparent substrate is provided on a portion corresponding to the portion between the first optical grating portion and the second optical grating portion provided on the first principal surface of the second transparent substrate that does not include optical grating, when the grating part is viewed in a plan view.
4 more elements
A manufacturing method of a grating part comprising:
- bringing a first transparent substrate having an optical grating provided on a first principal surface thereof into contact with a second transparent substrate having an optical grating provided on a first principal surface thereof, such that a second principal surface of the first transparent substrate on an opposite side from the first principal surface of the first transparent substrate faces a second principal surface of the second transparent substrate on an opposite side from the first principal surface of the second transparent substrate;
- and
- bonding the second principal surface of the first transparent substrate with the second principal surface of the second transparent substrate by any of room temperature bonding, diffusion bonding, and anodic bonding such that the grating part is unaffected by changes in ambient temperature, wherein
- the optical grating provided on the second transparent substrate further includes a first optical grating portion and a second optical grating portion, the first optical grating portion and the second optical grating portion are provided on separate portions of the first principal surface of the second transparent substrate, and a portion provided between the first optical grating portion and the second optical grating portion on the first principal surface of the second transparent substrate does not include optical grating, and
- the optical grating provided on the first principal surface of the first transparent substrate is provided on a portion corresponding to the portion between the first optical grating portion and the second optical grating portion provided on the first principal surface of the second transparent substrate that does not include optical grating, when the grating part is viewed in a plan view.
2 more elements
Dependencies are inferred from the claim text.