Test device control method and test device

A control method of a test device, the test device comprising a chuck on which a substrate is mounted, a plurality of objects to be tested being formed on the substrate, a tester configured to supply electric power to an object to be tested among the plurality of objects to be tested to test the object to be tested, and a controller configured to control a temperature of the chuck, the control method comprising:

• receiving, by the controller, a signal indicating whether the controller is capable of obtaining an actual temperature of the object to be tested or not;
• when the actual temperature of the object to be tested cannot be fed back, estimating a heat amount generated by the object to be tested based on information on the electric power supplied to the object to be tested and estimating a temperature difference between the temperature of the chuck and the temperature of the object to be tested on the basis of the estimated heat amount generated by the object to be tested;
• correcting a target temperature of the chuck on the basis of a target temperature of the object to be tested and the temperature difference;
• and
• controlling the temperature of the chuck based on the corrected target temperature of the chuck and an actual temperature of the chuck.