Multi-layer probes having longitudinal axes and preferential probe bending axes that lie in planes that are nominally parallel to planes of probe layers
AssigneeMicrofabrica Inc.
InventorMing Ting Wu
Life of this patent
Estimating the term…
Abstract
Embodiments are directed to probes formed from multiple layers with at least a portion of the layers including portions that include elastic compliant regions of the probes wherein such elastic portions of different layers are formed of different materials and wherein a plane of preferred elastic deformation of the probes is parallel to a plane containing (1) a normal to the planes of the layers and (2) a longitudinal axes of the probes or a local longitudinal axes of the probes.
Claims17
A multi-layer elongated probe for making an electrical connection, the probe comprising:
- a tip end comprising at least one layer;
- a base end comprising at least one layer;
- and
- an intermediate region comprising at least one elastically compliant region formed from materials that are different from the tip end and the base end,
- wherein the intermediate region connects the tip end to the base end,
- wherein the intermediate region is formed from at least three layers and at least two distinct materials,
- wherein for a plurality of pairs of adjacent layers, each pair includes a first adjacent layer and a second adjacent layer,
- wherein a material on one of the first and second adjacent layers is different from a material on the other of the first and second adjacent layers,
- wherein the elastically compliant region of the probe has a preferential bending axis that extends substantially parallel to planes of the layers when subjected to a compressive force between the base end and the tip end, and
- wherein the probe is defined by a notch in the at least one elastically compliant region on a side of the probe that provides for preferential bending of the probe such that the at least one elastically compliant region bulges to another side of the probe.
A probe array comprising a plurality of multi-layer elongated probes for making an electrical connection, the probe array comprising:
- (a) a plurality of probes, with each probe comprising:
- a base end comprising at least one layer;
- and
- (ii) an intermediate region comprising at least one elastically compliant region formed from materials that are different from the tip end and the base end, wherein the intermediate region connects the tip end to the base end, wherein the intermediate region is formed from at least three layers and at least two distinct materials, wherein for a plurality of pairs of adjacent layers, each pair includes a first adjacent layer and a second adjacent layer, wherein a material on one of the first and second adjacent layers is different from a material on the other of the first and second adjacent layers, and wherein the probe is defined by a notch in the at least one elastically compliant region on a side of the probe that provides for preferential bending of the probe such that the at least one elastically compliant region bulges to another side of the probe;
- (b) at least one guide plate for aligning at least one of the top or bottoms of probes in a desired array configuration wherein at least one end of each probe, when held by the guide plate, is capable of movement along an axis when contacted to an electronic component,
- wherein the elastically compliant region of a plurality of the probes have preferential configurations, when held by the at least one guide plate, to bend in a plane that includes a normal of the multiple layers of each respective probe and the axis of movement of the respective probe when contacted to the electronic component.
A probe array comprising a plurality of multi-layer elongated probes for making an electrical connection, the probe array comprising:
- (a) a plurality of probes, with each probe comprising:
- a base end comprising at least one layer;
- and
- (ii) an intermediate region comprising at least one elastically compliant region formed from materials that are different from the tip end and the base end, wherein the intermediate region connects the tip end to the base end, wherein the intermediate region is formed from at least three layers and at least two distinct materials, wherein for a plurality of pairs of adjacent layers, each pair includes a first adjacent layer and a second adjacent layer, wherein a material on one of the first and second adjacent layers is different from a material on the other of the first and second adjacent layers, and wherein the probe is defined by a notch in the at least one elastically compliant region on a side of the probe that provides for preferential bending of the probe such that the at least one elastically compliant region bulges to another side of the probe;
- (b) at least two guide plates for aligning top and bottoms of probes in a desired array configuration wherein at least one end of each probe, when held by the guide plates, is capable of movement along an axis when contacted to an electronic component,
- wherein the elastically compliant region of a plurality of the probes have preferential configurations, when held by the guide plates, to bend in a plane that includes a normal of the multiple layers of each respective probe and the axis of movement of the respective probe when contacted to the electronic component.
Dependencies are inferred from the claim text.