Micromechanical sensor
AssigneeRobert Bosch GmbH
InventorsAndrea Visconti, Artjom Kosov, Jochen Hahn, Johannes Classen, Timo Giesselmann
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AssigneeRobert Bosch GmbH
InventorsAndrea Visconti, Artjom Kosov, Jochen Hahn, Johannes Classen, Timo Giesselmann
Estimating the term…
A micromechanical sensor, including a micromechanical chip having a first micromechanical structure, a first evaluation chip, having a first application-specific integrated circuit, and a second evaluation chip having a second application-specific integrated circuit. The first evaluation chip and the micromechanical chip are situated in a stacked manner, the micromechanical chip being directly electrically conductively connected with the first evaluation chip and the first evaluation chip being directly electrically conductively connected with the second evaluation chip. The first application-specific integrated circuit primarily includes analog circuit elements and the second application-specific circuit primarily includes digital circuit elements.
A micromechanical sensor, comprising:
Dependencies are inferred from the claim text.